JPH0413614Y2 - - Google Patents
Info
- Publication number
- JPH0413614Y2 JPH0413614Y2 JP13862886U JP13862886U JPH0413614Y2 JP H0413614 Y2 JPH0413614 Y2 JP H0413614Y2 JP 13862886 U JP13862886 U JP 13862886U JP 13862886 U JP13862886 U JP 13862886U JP H0413614 Y2 JPH0413614 Y2 JP H0413614Y2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- light
- pressurized gas
- air
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 34
- 238000010926 purge Methods 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 9
- 239000000428 dust Substances 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 6
- 239000000779 smoke Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000030366 Scorpidinae Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Prevention Of Fouling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13862886U JPH0413614Y2 (en]) | 1986-09-10 | 1986-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13862886U JPH0413614Y2 (en]) | 1986-09-10 | 1986-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6347217U JPS6347217U (en]) | 1988-03-30 |
| JPH0413614Y2 true JPH0413614Y2 (en]) | 1992-03-30 |
Family
ID=31043788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13862886U Expired JPH0413614Y2 (en]) | 1986-09-10 | 1986-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413614Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2502443B2 (ja) * | 1991-01-30 | 1996-05-29 | 日本鋼管株式会社 | エリプソメ―タ及びこれを用いた塗布厚制御方法 |
-
1986
- 1986-09-10 JP JP13862886U patent/JPH0413614Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6347217U (en]) | 1988-03-30 |
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